Metrology for block copolymer directed self-assembly structures using Mueller matrix-based scatterometry

标题
Metrology for block copolymer directed self-assembly structures using Mueller matrix-based scatterometry
作者
关键词
-
出版物
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 14, Issue 2, Pages 021102
出版商
SPIE-Intl Soc Optical Eng
发表日期
2015-04-11
DOI
10.1117/1.jmm.14.2.021102

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