4.5 Article Proceedings Paper

Ion beam, focused ion beam, and plasma discharge machining

期刊

CIRP ANNALS-MANUFACTURING TECHNOLOGY
卷 58, 期 2, 页码 647-662

出版社

ELSEVIER
DOI: 10.1016/j.cirp.2009.09.007

关键词

Ion Beam Machining; Focused Ion Beam Machining; Plasma discharge machining

资金

  1. Engineering and Physical Sciences Research Council [GR/S85337/01, EP/C534212/1] Funding Source: researchfish

向作者/读者索取更多资源

Non-conventional methods of machining are used for many engineering applications where the traditional processes fail to be cost-effective. Such processes include Ion Beam Machining (IBM), focused ion beam (FIB) machining and plasma discharge machining. The mechanisms of material removal and associated hardware and software developed for industrial applications of these fascinating electrophysical and chemical machining processes are reviewed together with the latest research findings. (C) 2009 CIRP.

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