Effects of O2/Ar ratio and annealing temperature on electrical properties of Ta2O5film prepared by magnetron sputtering

标题
Effects of O2/Ar ratio and annealing temperature on electrical properties of Ta2O5film prepared by magnetron sputtering
作者
关键词
-
出版物
Chinese Physics B
Volume 22, Issue 2, Pages 027701
出版商
IOP Publishing
发表日期
2013-02-22
DOI
10.1088/1674-1056/22/2/027701

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