Thickness dependence of grain size and surface roughness for dc magnetron sputtered Au films

标题
Thickness dependence of grain size and surface roughness for dc magnetron sputtered Au films
作者
关键词
-
出版物
Chinese Physics B
Volume 19, Issue 8, Pages 086802
出版商
IOP Publishing
发表日期
2010-08-14
DOI
10.1088/1674-1056/19/8/086802

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