Influence of Oxygen Exposure on the Nucleation of Platinum Atomic Layer Deposition: Consequences for Film Growth, Nanopatterning, and Nanoparticle Synthesis

标题
Influence of Oxygen Exposure on the Nucleation of Platinum Atomic Layer Deposition: Consequences for Film Growth, Nanopatterning, and Nanoparticle Synthesis
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 25, Issue 9, Pages 1905-1911
出版商
American Chemical Society (ACS)
发表日期
2013-04-04
DOI
10.1021/cm400562u

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