Atomic Layer Deposition of SrTiO3 Films with Cyclopentadienyl-Based Precursors for Metal–Insulator–Metal Capacitors

标题
Atomic Layer Deposition of SrTiO3 Films with Cyclopentadienyl-Based Precursors for Metal–Insulator–Metal Capacitors
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 25, Issue 6, Pages 953-961
出版商
American Chemical Society (ACS)
发表日期
2013-02-26
DOI
10.1021/cm304125e

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