Conformal Formation of (GeTe2)(1–x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories

标题
Conformal Formation of (GeTe2)(1–x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 24, Issue 11, Pages 2099-2110
出版商
American Chemical Society (ACS)
发表日期
2012-05-10
DOI
10.1021/cm300539a

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