Microcontact Printed RuOx Film as an Activation Layer for Selective-Area Atomic Layer Deposition of Ruthenium

标题
Microcontact Printed RuOx Film as an Activation Layer for Selective-Area Atomic Layer Deposition of Ruthenium
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 24, Issue 2, Pages 275-278
出版商
American Chemical Society (ACS)
发表日期
2011-12-15
DOI
10.1021/cm202468s

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