Molybdenum Atomic Layer Deposition Using MoF6and Si2H6as the Reactants

标题
Molybdenum Atomic Layer Deposition Using MoF6and Si2H6as the Reactants
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 23, Issue 7, Pages 1668-1678
出版商
American Chemical Society (ACS)
发表日期
2011-03-12
DOI
10.1021/cm101673u

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