Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition

标题
Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 22, Issue 9, Pages 2850-2856
出版商
American Chemical Society (ACS)
发表日期
2010-04-13
DOI
10.1021/cm100057y

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