In Situ Reaction Mechanism Studies on Atomic Layer Deposition of Sb2Te3and GeTe from (Et3Si)2Te and Chlorides

标题
In Situ Reaction Mechanism Studies on Atomic Layer Deposition of Sb2Te3and GeTe from (Et3Si)2Te and Chlorides
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 22, Issue 4, Pages 1386-1391
出版商
American Chemical Society (ACS)
发表日期
2010-01-01
DOI
10.1021/cm902180d

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