Growth Behavior of Al-Doped TiO2Thin Films by Atomic Layer Deposition

标题
Growth Behavior of Al-Doped TiO2Thin Films by Atomic Layer Deposition
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 20, Issue 11, Pages 3723-3727
出版商
American Chemical Society (ACS)
发表日期
2008-05-20
DOI
10.1021/cm800280t

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