3.9 Article

Electron Beam-Induced CVD of Nanoalloys for Nanoelectronics

期刊

CHEMICAL VAPOR DEPOSITION
卷 20, 期 7-9, 页码 251-257

出版社

WILEY-V C H VERLAG GMBH
DOI: 10.1002/cvde.201407119

关键词

FEBID; Gold; Iron; Multi-material; Nanoalloys

资金

  1. European Community [ENHANCE-238409]
  2. Austrian Science Fund [P24093]
  3. Center for Micro- and Nanostructures (ZMNS) at Vienna University of Technology
  4. Austrian Science Fund (FWF) [P24093] Funding Source: Austrian Science Fund (FWF)
  5. Austrian Science Fund (FWF) [P 24093] Funding Source: researchfish

向作者/读者索取更多资源

Among various multi-metal combinations, Au-Fe nanoalloys are envisaged as prospective materials for data storage applications. Here we report on the first successful achievement of Au-Fe nanoalloys using focused electron beam-induced deposition (FEBID), exploiting the possibility of directly writing nanostructures at nanometer resolution. Gaseous organometallic precursors are injected simultaneously into the deposition chamber to co-deposit Fe and Au within the same nanostructure. Fabricated nanostructures show a spatially uniform elemental ratio of iron to gold that can be tailored by experimental conditions.

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