A Ballistic Transport and Surface Reaction Model for Simulating Atomic Layer Deposition Processes in High-Aspect-Ratio Nanopores

标题
A Ballistic Transport and Surface Reaction Model for Simulating Atomic Layer Deposition Processes in High-Aspect-Ratio Nanopores
作者
关键词
-
出版物
CHEMICAL VAPOR DEPOSITION
Volume 17, Issue 10-12, Pages 353-365
出版商
Wiley
发表日期
2011-12-15
DOI
10.1002/cvde.201106922

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