Atomic Layer Deposition of Gadolinium Aluminate using Gd(iPrCp)3, TMA, and O3 or H2O

标题
Atomic Layer Deposition of Gadolinium Aluminate using Gd(iPrCp)3, TMA, and O3 or H2O
作者
关键词
-
出版物
CHEMICAL VAPOR DEPOSITION
Volume 16, Issue 4-6, Pages 170-178
出版商
Wiley
发表日期
2010-06-22
DOI
10.1002/cvde.200906833

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