Mass Analysis of Growth of Al2O3 Thin Films from Low-Temperature Atomic Layer Deposition on Woven Cotton

出版年份 2010 全文链接

标题

Mass Analysis of Growth of Al2O3 Thin Films from Low-Temperature Atomic Layer Deposition on Woven Cotton

作者

关键词

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出版物

CHEMICAL VAPOR DEPOSITION

Volume 16, Issue 7-9, Pages 248-253

出版商

Wiley

发表日期

2010-08-31

DOI

10.1002/cvde.201006854

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