ALD of YF3Thin Films from TiF4and Y(thd)3Precursors

标题
ALD of YF3Thin Films from TiF4and Y(thd)3Precursors
作者
关键词
-
出版物
CHEMICAL VAPOR DEPOSITION
Volume 15, Issue 1-3, Pages 27-32
出版商
Wiley
发表日期
2009-03-05
DOI
10.1002/cvde.200806721

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