Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc

标题
Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
作者
关键词
-
出版物
CHEMICAL VAPOR DEPOSITION
Volume 15, Issue 1-3, Pages 15-20
出版商
Wiley
发表日期
2009-02-19
DOI
10.1002/cvde.200806725

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