3.9 Article

Deposition of Mo Oxide and Metallic Mo Films by Chemical Vapor Transport of MoO3(OH)2

期刊

CHEMICAL VAPOR DEPOSITION
卷 15, 期 7-9, 页码 199-203

出版社

WILEY-V C H VERLAG GMBH
DOI: 10.1002/cvde.200906738

关键词

CVT; Hydrogen reduction; Molybdenum; Molybdenum oxide; MoO3(OH)(2); Nanostructure; Thin film deposition

资金

  1. Hanyang University [HY-2007-1]

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Molybdenum oxides have attracted interest as gas sensing, catalytic, photochromic, and electrochromic materials. Molybdenum coatings are currently applied to materials for friction and wear control over a wide temperature range; they are also resistant to corrosion and chemicals. In this study, a new technique for deposition of MoO2 and metallic Mo, through the chemical vapor transport (CVT) of MoO3(OH)(2) during hydrogen reduction of a MoO3 powder, is presented. MoO2 and metallic Mo are deposited in two temperature ranges during hydrogen reduction, namely, MoO3 -> MoO2 and MoO2 -> Mo, respectively. The MoO2 film is directly deposited by using volatile MoO3(OH)(2) gas formed during the hydrogen reduction of MoO3 to MoO2 at the lower temperature, while metallic Mo film is obtained by simultaneous hydrogen reduction of deposited MoO2 at the higher temperature.

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