PECVD of Fluorocarbon Coatings from Hexafluoropropylene Oxide: Glow vs. Afterglow

标题
PECVD of Fluorocarbon Coatings from Hexafluoropropylene Oxide: Glow vs. Afterglow
作者
关键词
-
出版物
CHEMICAL VAPOR DEPOSITION
Volume 15, Issue 4-6, Pages 95-100
出版商
Wiley
发表日期
2009-06-02
DOI
10.1002/cvde.200806755

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