Preparation of IGZO sputtering target and its applications to thin-film transistor devices

标题
Preparation of IGZO sputtering target and its applications to thin-film transistor devices
作者
关键词
-
出版物
CERAMICS INTERNATIONAL
Volume 38, Issue 5, Pages 3977-3983
出版商
Elsevier BV
发表日期
2012-01-31
DOI
10.1016/j.ceramint.2012.01.052

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