4.8 Article

Temperature gradient chemical vapor deposition of vertically aligned carbon nanotubes

期刊

CARBON
卷 54, 期 -, 页码 343-352

出版社

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.carbon.2012.11.046

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资金

  1. Swiss National Science Foundation [200021-137964]
  2. Strategic Korean-Swiss Cooperative Program in Science and Technology
  3. Microfabrication Center (FIRST)
  4. Electron Microscopy Center (EMEZ)
  5. COST action NanoTP [MP0901]
  6. EU project Technotubes
  7. Swiss National Science Foundation (SNF) [200021_137964] Funding Source: Swiss National Science Foundation (SNF)

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We present temperature gradient chemical vapor deposition (TG CVD) for producing vertically aligned (VA-) carbon nanotubes (CNTs). Independent heaters on the gas inlet and catalyst substrate sides of a cold-wall, vertical CVD reactor can modulate the gas temperature gradient to lead to controlled thermal histories of acetylene precursor. Our growth results reveal that such a precursor thermal history can play a significant role in the growth and structural features of the resultant VA-CNTs. We find several gas thermal zones particularly important to the VA-CNT growth by evaluating the precursor dwell time in different zones. Thermal treatment of the acetylene precursor at 600-700 degrees C is found crucial for the synthesis of VA-CNTs. When this thermal zone is conjoined in particular with a zone >700 degrees C, efficient growths of single-walled and double-walled VA-CNTs can be achieved. These gas thermal zones can contribute to VA-CNT growths by mixing various secondary hydrocarbons with acetylene, corroborated by the results of our reacting flow simulation. Our findings emphasize the influence of gas-phase reactions on the VA-CNT growth and suggest that our TG CVD approach can be practically utilized to modulate complex gas-phase phenomena for the controlled growth of VA-CNTs. (c) 2012 Elsevier Ltd. All rights reserved.

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