Fluorine functionalization of epitaxial graphene for uniform deposition of thin high-κ dielectrics

标题
Fluorine functionalization of epitaxial graphene for uniform deposition of thin high-κ dielectrics
作者
关键词
-
出版物
CARBON
Volume 50, Issue 6, Pages 2307-2314
出版商
Elsevier BV
发表日期
2012-01-30
DOI
10.1016/j.carbon.2012.01.050

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