Room-temperature fabrication of highly oriented β-Ga2O3 thin films by excimer laser annealing

出版年份 2015 全文链接

标题

作者

关键词

A3. Pulsed laser deposition, A3. Laser processing, A3. Excimer laser annealing, A3. Solid phase crystallization, B1. Oxides, B2. Semiconducting materials

出版物

JOURNAL OF CRYSTAL GROWTH

Volume 424, Issue -, Pages 38-41

出版商

Elsevier BV

发表日期

2015-05-08

DOI

10.1016/j.jcrysgro.2015.04.026

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