Influence of nitrogen flow rates on materials properties of CrN x films grown by reactive magnetron sputtering

标题
Influence of nitrogen flow rates on materials properties of CrN x films grown by reactive magnetron sputtering
作者
关键词
-
出版物
BULLETIN OF MATERIALS SCIENCE
Volume 35, Issue 4, Pages 505-511
出版商
Springer Nature
发表日期
2012-09-07
DOI
10.1007/s12034-012-0344-0

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