期刊
BIOMEDICAL MICRODEVICES
卷 12, 期 1, 页码 41-48出版社
SPRINGER
DOI: 10.1007/s10544-009-9356-y
关键词
Microtube; Microneedle; Array; Extracellular recording; Low invasiveness; High signal-to-noise ratio
资金
- Global COE Program
- JSPS
- Japan Science and Technology Agency (JST)
- National Institute of Advanced Industrial Science and Technology
- Strategic Research Program for Brain Sciences (SRPBS)
- Grants-in-Aid for Scientific Research [20226010] Funding Source: KAKEN
We report on the development of a microtube electrode array as a neural interface device. To combine the desired properties for the neural interface device, such as low invasiveness with a small needle and a good signal-to-noise ratio in neural recordings, we applied the structure of a glass pipette electrode to each microtube electrode. The device was fabricated as sub-5-mu m-diameter out-of-plane silicon dioxide microtube arrays using silicon microneedle templates, which are grown by the selective vapor-liquid-solid method. The microtubes had inner diameters of 1.9-6.4 mu m and a length of 25 mu m. Impedances ranged from 220 k Omega to 1.55 M Omega, which are less than those for conventional microneedles. In addition, the microtube electrodes had less signal attenuation than conventional microneedle electrodes. We confirmed that the effects of parasitic capacitances between neighboring microtubes and channels were sufficiently small using a test signal. Finally, neural responses evoked from a rat peripheral nerve were recorded in vivo using a microtube electrode to confirm that this type of electrode can be used for both electrophysiological measurements and as a neural interface device.
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