期刊
BIOINSPIRATION & BIOMIMETICS
卷 7, 期 4, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1748-3182/7/4/046009
关键词
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资金
- Customized Intelligent Life-Inspired Arrays (CILIA) project
- Future and Emergent Technologies arm of the IST programme of the EU
- Bio-EARS Vici grant from the Dutch Technology Foundation (STW/NWO)
Flow-sensor arrays uncover the potential to measure spatio-temporal flow patterns rather than flow measurements at just a single point. We present in this paper the developments in design, fabrication and interfacing of biomimetic flow-sensor arrays, inspired by flow-sensitive organs (cerci) of crickets. For the purpose of high-resolution flow field visualization by our artificial hair flow-sensor arrays, various array-interfacing schemes are discussed and compared. Frequency division multiplexing (FDM) is shown to be an attractive method for efficient interrogation of capacitive array sensors. Using silicon-on-insulator technology with deep trench isolation structures, hair-based flow-sensors with differential capacitive read-out, arranged in single-chip arrays, have been successfully fabricated. FDM is implemented and used to interrogate individual hair sensors providing simultaneous real-time flow measurements from multiple hairs. This powerful approach is demonstrated by reconstruction of the field of a harmonic dipole field at the position of the hairs and by localizing this dipole source relative to the array elements.
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