Highly transparent and conductive Al-doped ZnO films synthesized by pulsed laser co-ablation of Zn and Al targets assisted by oxygen plasma

标题
Highly transparent and conductive Al-doped ZnO films synthesized by pulsed laser co-ablation of Zn and Al targets assisted by oxygen plasma
作者
关键词
Thin films, Al-doped ZnO, In-situ doping, Co-ablation deposition, Optical properties, Electrical properties
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 626, Issue -, Pages 415-420
出版商
Elsevier BV
发表日期
2014-12-02
DOI
10.1016/j.jallcom.2014.11.153

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