Oxidation resistance and characterization of (AlCrMoTaTi)-Si x -N coating deposited via magnetron sputtering

标题
Oxidation resistance and characterization of (AlCrMoTaTi)-Si x -N coating deposited via magnetron sputtering
作者
关键词
Coating materials, Nitride materials, Vapor deposition, Crystal structure, Transmission electron microscopy, TEM
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 647, Issue -, Pages 179-188
出版商
Elsevier BV
发表日期
2015-06-16
DOI
10.1016/j.jallcom.2015.06.025

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