Highly conductive boron doped micro/nanocrystalline silicon thin films deposited by VHF-PECVD for solar cell applications

标题
Highly conductive boron doped micro/nanocrystalline silicon thin films deposited by VHF-PECVD for solar cell applications
作者
关键词
Thin films, Vapor deposition, Photoconductivity and photovoltaics, AFM, X-ray diffraction
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 643, Issue -, Pages 94-99
出版商
Elsevier BV
发表日期
2015-04-22
DOI
10.1016/j.jallcom.2015.04.077

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