Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications

标题
Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 459, Issue -, Pages 596-605
出版商
Elsevier BV
发表日期
2018-08-03
DOI
10.1016/j.apsusc.2018.07.210

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