Physical deposition of carbon doped titanium nitride film by DC magnetron sputtering for metallic implant coating use

标题
Physical deposition of carbon doped titanium nitride film by DC magnetron sputtering for metallic implant coating use
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 295, Issue -, Pages 81-85
出版商
Elsevier BV
发表日期
2014-01-11
DOI
10.1016/j.apsusc.2014.01.010

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