Atomic layer deposited Al2O3 films for anti-reflectance and surface passivation applications

标题
Atomic layer deposited Al2O3 films for anti-reflectance and surface passivation applications
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 288, Issue -, Pages 430-434
出版商
Elsevier BV
发表日期
2013-10-19
DOI
10.1016/j.apsusc.2013.10.051

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