Investigations on opto-electronical properties of DC reactive magnetron sputtered zinc aluminum oxide thin films annealed at different temperatures

标题
Investigations on opto-electronical properties of DC reactive magnetron sputtered zinc aluminum oxide thin films annealed at different temperatures
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 265, Issue -, Pages 169-175
出版商
Elsevier BV
发表日期
2012-11-10
DOI
10.1016/j.apsusc.2012.10.158

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