A study on structural, optical and hydrophobic properties of oblique angle sputter deposited HfO2 films

标题
A study on structural, optical and hydrophobic properties of oblique angle sputter deposited HfO2 films
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 283, Issue -, Pages 332-338
出版商
Elsevier BV
发表日期
2013-07-09
DOI
10.1016/j.apsusc.2013.06.112

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