Microstructure, mechanical and tribological behavior of MoNx/SiNx multilayer coatings prepared by magnetron sputtering

标题
Microstructure, mechanical and tribological behavior of MoNx/SiNx multilayer coatings prepared by magnetron sputtering
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 274, Issue -, Pages 231-236
出版商
Elsevier BV
发表日期
2013-03-16
DOI
10.1016/j.apsusc.2013.03.021

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