期刊
APPLIED SURFACE SCIENCE
卷 282, 期 -, 页码 67-72出版社
ELSEVIER
DOI: 10.1016/j.apsusc.2013.05.042
关键词
Direct modification; Laser interference lithography; Silicon; Micro and nano structures
类别
资金
- National Key Basic Research Program of China (973 Program) [2012CB326400, 2012CB326406]
- Special Development Program of Central Financial Support to Local Universities [2011-183]
- EU FP7 (Laser-NaMi) [247644]
- EU FP7 (ECNANOMAN) [269219]
- International Science and Technology Cooperation Program of China [2012DFA11070]
- National Natural Science Foundation Program of China [60940035, 61176002]
- Doctoral Program of Higher Education of China [20112216110002]
- Jilin Provincial Science and Technology Program [201115157, 20090401, 20110704]
- Guangdong Science and Technology Program [2009B091300006, 2011B010700101]
- Science and Technology Program of Changchun City [09GH07, 11KP04]
- Program of Changchun University of Science and Technology [129666, XJJLG201101]
Periodic and quasi-periodic structures on silicon surface have numerous significant applications in photoelectronics and surface engineering. A number of technologies have been developed to fabricate the structures in various research fields. In this work, we take the strategy of direct nanosecond laser interference lithography technology, and focus on the silicon material to create different well-defined surface structures based on theoretical analysis of the formation of laser interference patterns. Two, three and four-beam laser interference systems were set up to fabricate the grating, regular triangle and square structures on silicon surfaces, respectively. From the AFM micrographs, the critical features of structures have a dependence on laser fluences. For a relative low laser fluence, grating and dot structures formed with bumps due to the Marangoni Effect. With the increase of laser fluences, melt and evaporation behaviors can be responsible for the laser modification. By properly selecting the process parameters, well-defined grating and dot structures can been achieved. It can be demonstrated that direct laser interference lithography is a facile and efficient technology with the advantage of a single process procedure over macroscale areas for the fabrication of micro and nano structures. (C) 2013 Elsevier B.V. All rights reserved.
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