Extended study of the atomic step-terrace structure on hexagonal SiC (0001) by chemical-mechanical planarization

标题
Extended study of the atomic step-terrace structure on hexagonal SiC (0001) by chemical-mechanical planarization
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 284, Issue -, Pages 195-206
出版商
Elsevier BV
发表日期
2013-08-02
DOI
10.1016/j.apsusc.2013.07.080

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