期刊
APPLIED SURFACE SCIENCE
卷 265, 期 -, 页码 738-744出版社
ELSEVIER
DOI: 10.1016/j.apsusc.2012.11.096
关键词
In doped cadmium oxide; Pulsed filtered cathodic arc deposition; Transparent conductors
类别
资金
- LDRD Program of Lawrence Berkeley National Laboratory
- Assistant Secretary for Energy Efficiency and Renewable Energy, Office of Building Technology, of the U.S. Department of Energy under U.S. Department of Energy [DE-AC02-05CH11231]
- Office of Science, Office of Basic Energy Sciences
- National Natural Science Foundation of China [51072039, 50972031]
- Ph.D. Programs Foundation of the Ministry of Education of China [20112302110036]
Indium doped cadmium oxide (CdO:In) films with different In concentrations were prepared on low-cost glass substrates by pulsed filtered cathodic arc deposition (PFCAD). It is shown that polycrystalline CdO:In films with smooth surface and dense structure are obtained. In-doping introduces extra electrons leading to remarkable improvements of electron mobility and conductivity, as well as improvement in the optical transmittance due to the Burstein-Moss effect. CdO:In films on glass substrates with thickness near 230 nm show low resistivity of 7.23 x 10(-5) Omega cm, high electron mobility of 142 cm(2)/Vs, and mean transmittance over 80% from 500 to 1250 nm (including the glass substrate). These high quality pulsed arc-grown CdO:In films are potentially suitable for high efficiency multi-junction solar cells that harvest a broad range of the solar spectrum. (c) 2012 Elsevier B.V. All rights reserved.
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