Effect of negative substrate bias on the microstructure and mechanical properties of Ti–Si–N films deposited by a hybrid filtered cathodic arc and ion beam sputtering technique

标题
Effect of negative substrate bias on the microstructure and mechanical properties of Ti–Si–N films deposited by a hybrid filtered cathodic arc and ion beam sputtering technique
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 258, Issue 18, Pages 6897-6901
出版商
Elsevier BV
发表日期
2012-03-29
DOI
10.1016/j.apsusc.2012.03.127

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