Preferential growth of Si films on 6H-SiC(0001) C-face

标题
Preferential growth of Si films on 6H-SiC(0001) C-face
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 261, Issue -, Pages 88-91
出版商
Elsevier BV
发表日期
2012-08-10
DOI
10.1016/j.apsusc.2012.07.101

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