Atomic force microscopy based repeatable surface nanomachining for nanochannels on silicon substrates

标题
Atomic force microscopy based repeatable surface nanomachining for nanochannels on silicon substrates
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 258, Issue 22, Pages 8689-8695
出版商
Elsevier BV
发表日期
2012-05-30
DOI
10.1016/j.apsusc.2012.05.076

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