Effect of RF power and sputtering pressure on the structural and optical properties of TiO2 thin films prepared by RF magnetron sputtering

标题
Effect of RF power and sputtering pressure on the structural and optical properties of TiO2 thin films prepared by RF magnetron sputtering
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 257, Issue 24, Pages 10869-10875
出版商
Elsevier BV
发表日期
2011-08-03
DOI
10.1016/j.apsusc.2011.07.125

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