Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering

In this study, (TiVCrZrHf)N multi-component coatings with quinary metallic elements were deposited by reactive magnetron sputtering system. The composition, structure, and mechanical properties of the coatings deposited at different N-2 flow rates were investigated. The (TiVCrZrHf) N coatings deposited at N-2 flow rates of 0, 1, and 2 SCCM showed an amorphous structure, whereas those deposited at N-2 flow rates of 4 and 6 SCCM showed a simple face-centered cubic solid solution structure. A saturated nitride coating was obtained for N-2 flow of 4 SCCM and higher. By increasing N-2 flow to 4 SCCM, the hardness and modulus reached a maximum value of 23.8 +/- 0.8 and 267.3 +/- 4.0 GPa, respectively. (C) 2011 Elsevier B. V. All rights reserved.