Correlation of sp3 and sp2 fraction of carbon with electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon films

标题
Correlation of sp3 and sp2 fraction of carbon with electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon films
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 257, Issue 15, Pages 6804-6810
出版商
Elsevier BV
发表日期
2011-03-08
DOI
10.1016/j.apsusc.2011.02.134

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