期刊
APPLIED SURFACE SCIENCE
卷 258, 期 4, 页码 1366-1372出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2011.09.065
关键词
Carbon nanotubes; Plasma enhanced chemical vapor deposition
Single-walled carbon nanotubes (SWCNTs) and few-walled carbon nanotubes (FWCNTs) have been selectively synthesized by plasma enhanced chemical vapor deposition at a relative low temperature (550 degrees C) by tuning the thickness of iron catalyst. The parametric study and the optimization of the nanotube growth were undertaken by varying inductive power, temperature, catalyst thickness, and plasma to substrate distance. When an iron film of 3-5 nm represented the catalyst thickness for growing FWCNT arrays, SWCNTs were synthesized by decreasing the catalyst thickness to 1 nm. The nanotubes were characterized by field emission scanning electron microscopy, transmission electron microscopy, and Raman spectroscopy. Electron field emission properties of the nanotubes indicate that the SWCNTs exhibit lower turn-on field compared to the FWCNTs, implying better field emission performance. (C) 2011 Elsevier B.V. All rights reserved.
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