Surface morphology, growth rate and quality of diamond films synthesized in hot filament CVD system under various methane concentrations

标题
Surface morphology, growth rate and quality of diamond films synthesized in hot filament CVD system under various methane concentrations
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 257, Issue 20, Pages 8420-8426
出版商
Elsevier BV
发表日期
2011-05-01
DOI
10.1016/j.apsusc.2011.04.097

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