Improving the tribological performances of graphite-like carbon films on Si3N4 and SiC by using Si interlayers

出版年份 2011 全文链接

标题

作者

关键词

出版物

Volume 257, Issue 23, Pages 10246-10253

出版商

Elsevier BV

发表日期

2011-07-21

DOI

10.1016/j.apsusc.2011.07.030

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