Optical emission spectroscopy by Ar3+ ion sputtering of Ti surface under O2 environment

标题
Optical emission spectroscopy by Ar3+ ion sputtering of Ti surface under O2 environment
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 257, Issue 13, Pages 5789-5792
出版商
Elsevier BV
发表日期
2011-02-02
DOI
10.1016/j.apsusc.2011.01.103

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