期刊
APPLIED SURFACE SCIENCE
卷 256, 期 6, 页码 1849-1854出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2009.10.018
关键词
Initial growth; a-Plane ZnO; Volmer-Weber; Microstructure; Molecular beam epitaxy; Transmission electron microscopy
类别
资金
- Korea government (MOST) [R01-2007-000-20282-0, KRF-2008-314-D00153, KRF-2008-005-J00902]
Initial growth and very thin a-plane (1 1 (2) over bar 0) ZnO films grown on r-plane (1 (1) over bar 2 0) Al2O3 substrates by plasma-assisted molecular beam epitaxy (PAMBE) were studied using cross-sectional and plan-view transmission electron microscopy (TEM). The ZnO films were grown via Volmer-Weber growth mode, in which the (1 0 (1) over bar 0) facets were developed first followed by the (1 1 (2) over bar 0) facets. Critical thickness was determined to be a value between 2.5 and 3.5 nm. Since surface normal of the (1 (1) over bar 0 2) Al2O3 is [1 (1) over bar 0: 4025], while that of (1 1 (2) over bar 0) ZnO is [1 1 (2) over bar 0], two diffraction patterns for Al2O3 [2 (2) over bar 0 1] and ZnO [1 1 (2) over bar 0] zone axes were overlapped, which shows very different features in the bright field (BF) micrographs and selected area electron diffraction (SAED) patterns. So, careful analysis and caution are needed in characterizing the structural defects by plan-view TEM. (C) 2009 Elsevier B. V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据